Prevention of charge accumulation in micromirror devices through bias inversion
US7274347B2 · kind B2 · utility
13Cited by
3References
30Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 27, 2003 |
| Grant date | Sep 25, 2007 |
| Priority date | — |
| Expiry date | May 14, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG09G2320/04
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
Methods and apparatus are provided for preventing charge accumulation in microelectromechanical systems, especially in micromirror array devices having a plurality of micromirrors. Voltages are applied to the micromirrors for actuating the micromirrors. Polarities of the voltage differences between mirror plates and electrodes are inverted so as to prevent charge accumulation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.