Micromechanical component
US7275434B2 · kind B2 · utility
1Cited by
8References
6Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 25, 2003 |
| Grant date | Oct 2, 2007 |
| Priority date | — |
| Expiry date | Feb 25, 2023 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/0235
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In order to implement two different sensitivities simultaneously in one component, in particular in an acceleration sensor having a substrate, at least one spring device, and at least one seismic mass, it is proposed that the spring device be designed for an intrinsically nonlinear behavior corresponding to a progressive spring characteristic curve, in which a greater acceleration is associated at least locally with a greater rigidity (spring constant).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.