Beam adjusting sample, beam adjusting method and beam adjusting device
US7276692B2 · kind B2 · utility
2Cited by
6References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 7, 2003 |
| Grant date | Oct 2, 2007 |
| Priority date | — |
| Expiry date | Oct 19, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/21
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A beam adjusting sample having a flat surface being like a plate and having two edges orthogonal to each other is employed. A beam is applied to the beam adjusting sample to detect an amount of the beam passing through the beam adjusting sample. The beam vertically scans the two edges.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.