Piezoelectric thin-film resonator, piezoelectric filter, and electronic component including the piezoelectric filter
US7276994B2 · kind B2 · utility
52Cited by
10References
32Claims
0Family size
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Key dates
| Filing date | Dec 3, 2004 |
| Grant date | Oct 2, 2007 |
| Priority date | — |
| Expiry date | Mar 13, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/588
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A piezoelectric thin-film resonator includes a supporting substrate. A piezoelectric thin-film is formed on the supporting substrate. A lower electrode and an upper electrode are formed with the piezoelectric thin-film therebetween. The stiffness of at least one of the lower and upper electrodes is higher than that of the piezoelectric thin-film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.