Silicon fiber optic sensors
US7277605B2 · kind B2 · utility
1Cited by
5References
33Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 18, 2005 |
| Grant date | Oct 2, 2007 |
| Priority date | — |
| Expiry date | May 18, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/29359
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A Fabry-Perot cavity is formed by a partially or wholly reflective surface on the free end of an integrated elongate channel or an integrated bounding wall of a chip of a wafer and a partially reflective surface on the end of the optical fiber. Such a constructed device can be utilized to detect one or more physical parameters, such as, for example, strain, through the optical fiber using an optical detection system to provide measuring accuracies of less than aboutb0.1%.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.