Pressure sensor and method for fabricating the same
US7278326B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Mar 27, 2003 |
| Grant date | Oct 9, 2007 |
| Priority date | — |
| Expiry date | Aug 13, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06V40/1306
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor comprising a plurality of sensor parts arranged in matrix. A first electrode being connected with first wiring and a second electrode being connected with second wiring are disposed oppositely through a cavity part in the sensor part. The second electrode bends to the first electrode side in response to a pressure from a specimen and touches the first electrode upon application of a pressure of a specified level or above. When the specimen is pressed against a pressure detecting region, both electrodes touch each other at a sensor part corresponding to a protrusions of the specimen and are separated at a sensor part corresponding to a recess. When a scanning signal is fed from a scanning circuit to one wiring and presence of a signal flowing through the second wiring is detected by a sensing circuit, a pressure being applied to each sensor part can be detected. Furthermore, the shape is detected by feeding the scanning signal from the scanning circuit to each first wiring sequentially and scanning the pressure detecting region generally.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.