Apparatus and method of fabricating liquid crystal display panel
US7279044B2 · kind B2 · utility
4Cited by
2References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 4, 2004 |
| Grant date | Oct 9, 2007 |
| Priority date | — |
| Expiry date | Oct 4, 2024 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB05C5/0254
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An apparatus for fabricating a liquid crystal display panel includes a slit nozzle for applying a photo-resist liquid on a substrate, a nozzle driver for driving the slit nozzle, an air intake for inhaling air and/or impurities on the substrate through the slit nozzle before photo-resist is deposited on the substrate, and a gas supplier for supplying a gas through one or more channels in the slit nozzle to the substrate after the photo-resist is deposited on the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.