Patent · US Expired

Membrane sensor

US7279759B2 · kind B2 · utility

0Cited by

1References

13Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Roland Muller-Fiedler · Leonberg, DE
Hans Hecht · Stuttgart, DE
Joerg Muchow · Reutlingen, DE
Matthias Fuertsch · Gomaringen, DE
Andreas Stratmann · Gomaringen, DE
Heribert Weber · Leverkusen, DE
Winfried Bernhard · Gerlingen, DE
Detlef Gruen · Reutlingen, DE
Andreas Duell · Stuttgart, DE
Rainer Schink · Leonberg, DE
Ulrich Wagner · Bernburg, DE
Christoph Schelling · Stuttgart, DE

Key dates

Filing date	Feb 18, 2004
Grant date	Oct 9, 2007
Priority date	—
Expiry date	Feb 18, 2024

Classification

Technology area (CPC G)Physics
CPC primaryG01N7/10
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A micromechanical sensor and a method for manufacturing a micromechanical sensor which has at least one membrane are provided. The membrane is made of a first material which is accommodated in a surrounding second material, and the membrane is configured for sensing a medium surrounding it. The membrane is reinforced, at least partly, by a third material at break-sensitive points on the membrane rim. Reinforcement of the membrane rim increases the stability and thus also the service life of the membrane and the sensor.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.