Z-θ table activated by two rotary motors
US7279813B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 20, 2006 |
| Grant date | Oct 9, 2007 |
| Priority date | — |
| Expiry date | Jul 20, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02K2201/18
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A Z-θ table includes a bed capable of undergoing linear displacement along the Z-axis and angular positioning. The table includes two rotary motors arranged in a substantially concentric manner with two fixed stators. The interior rotor includes a device for guiding an intermediary piece along the Z-axis, and the exterior rotor includes a threaded portion that provides a nut associated with a threaded portion of an intermediary part arranged between the two rotors. The exterior rotor and the intermediary piece provide a ball-screw system. Each of the two rotors is associated with an angular displacement sensor for the precise determination of their angular positions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.