Permalloy bridge with selectable wafer-anistropy using multiple layers
US7279891B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 15, 2006 |
| Grant date | Oct 9, 2007 |
| Priority date | — |
| Expiry date | Jun 15, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R33/093
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A magnetic sensing method and apparatus include a plurality of bridge circuits, wherein each bridge circuit or element within a bridge is formed on a separate permalloy layer comprising a plurality of permalloy bridge runners. The permalloy bridge runners can be selected such that each permalloy bridge runner possesses a selectable wafer anisotropy to a length of the permalloy bridge runner in order to form a magnetic sensor based on the bridge circuits, maximize the magnetic sensitivity of the magnetic sensor, maximize the matching between bridges and independently control the wafer anisotropy through the use of multiple bridge circuits configured on separate permalloy layers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.