Temperature sensor and method of making the same
US7280028B2 · kind B2 · utility
11Cited by
11References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 17, 2004 |
| Grant date | Oct 9, 2007 |
| Priority date | — |
| Expiry date | Jun 11, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49085
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method for manufacturing a planar sensor, comprises disposing a film of a material on a substrate, wherein the material is selected from the group consisting of platinum, rhodium, palladium and mixtures and alloys comprising at least one of the foregoing materials; annealing the material; measuring a resistance value of the material; laser trimming the annealed material; heat treating the laser trimmed material; and laser trimming the heat treated material to form the sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.