Patent · US Expired

Dual sensor assemblies for positional output feedback

US7280935B2 · kind B2 · utility

4Cited by
2References
12Claims
0Family size

Assignee

Inventor

Key dates

Filing dateSep 2, 2004
Grant dateOct 9, 2007
Priority date
Expiry dateJul 19, 2025

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01D5/2417
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A system for precisely determining a position with resolution on the order of nanometers or sub-nanometers is described. In particular, a system is described that utilizes a first and a second sensor assembly to determine a position of a movable element over a distance many times the capable range of operation of either of the individual sensor assemblies. The two sensor assemblies leap-frog one another in an incremental fashion to ensure that at least one of the sensor assemblies is always within it operational range. Positional signals generated by one of the sensor assemblies can be used to calibrate the other sensor assembly, following an adjustment of the other sensor assembly. The described invention may be implemented in an optical storage disk mastering system to determine the position of mastering optics as the mastering optics translate over the surface of a storage master disk.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.