Method and device for calibration sensors
US7281405B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 1, 2005 |
| Grant date | Oct 16, 2007 |
| Priority date | — |
| Expiry date | Aug 1, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N33/0006
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and device are disclosed for calibrating sensors, which sensors are arranged on semiconductor chips and are e.g. to be used for detecting a substance in a fluid. The sensors are calibrated while they are still assembled on a semiconductor wafer by exposing the wafer to a calibration fluid containing a known amount of the substance to be measured. Hence, rather than first cutting the wafer, the sensors are calibrated at an early stage. For this purpose, they are placed on a chuck below a lid. The calibration fluid with known parameters is introduced between the wafer and the lid. This allows to test and calibrate a large number of sensors quickly.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.