Liquid media containing Lewis basic reactive compounds for storage and delivery of Lewis acidic gases
US7282084B2 · kind B2 · utility
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6References
17Claims
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Key dates
| Filing date | Oct 15, 2004 |
| Grant date | Oct 16, 2007 |
| Priority date | — |
| Expiry date | Aug 6, 2025 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF17C2223/0123
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
This invention relates to an improvement in a low-pressure storage and delivery system for gases having Lewis acidity, particularly hazardous specialty gases such as BF3 and diborane, which are utilized in the electronics industry. The improvement resides in storing the gases in a liquid incorporating a reactive compound having Lewis basicity capable of effecting a reversible reaction between a gas having Lewis acidity. The reactive compound comprises a reactive species that is dissolved, suspended, dispersed, or otherwise mixed with a nonvolatile liquid.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.