Method of fixing a sealing object to a base object
US7282104B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 6, 2002 |
| Grant date | Oct 16, 2007 |
| Priority date | — |
| Expiry date | Dec 25, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/14
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A sealing-object (4) is fixed to a base-object (10). The sealing-object comprises a through-hole (5). The objects are fixed to each other in the following manner. In a preparation step, a fixing layer (1, 2, 3) is provided between the base-object and the sealing-object. In addition an evacuation device (6) equipped with an evacuation channel (7) is placed onto the sealing-object. The through-hole of the sealing object has a first extremity opening out on the evacuation channel and a second extremity opening out on the fixing layer. In a fixing step, the fixing layer is heated which causes the fixing layer to release gas. The gas is at least partially evacuated via the through-hole of the sealing-object and the evacuation channel of the evacuation device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.