Zinc oxide film treatment method and method of manufacturing photovoltaic device utilizing the same
US7282132B2 · kind B2 · utility
12Cited by
34References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 22, 2004 |
| Grant date | Oct 16, 2007 |
| Priority date | — |
| Expiry date | Oct 12, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A film of zinc oxide electrochemically deposited from an aqueous solution is subjected to heat treatment at a temperature equal to or higher than 150° C. and equal to or lower than 400° C. in a nitrogen or inert gas atmosphere that contains oxygen, thereby obtaining a zinc oxide film that is low in electric resistance without impairing the light transmittance of the zinc oxide film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.