Electro-optical device, method of manufacturing electro-optical device, and electronic apparatus
US7282385B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 26, 2005 |
| Grant date | Oct 16, 2007 |
| Priority date | — |
| Expiry date | Jan 30, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K2102/3031
Abstract
To provide a manufacturing method of an electro-optical device capable of effectively forming self-emitting elements in a large substrate on which a plurality of small substrates are arranged in a plane, without increasing the size of a manufacturing apparatus, the electro-optical device manufactured by the method, and an electronic apparatus equipped with the same. When manufacturing an organic EL display device by bonding a plurality of small substrates, processes required for a laser annealing technique and a photolithography technique, such as a process of forming TFTs and a process of forming pixel electrode, are performed before a process of bonding the small substrates to the large substrate, and organic EL elements are formed by an inkjet method after the bonding process. Further, a protective film is formed on the small substrates while the organic EL display elements are being formed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.