Measuring sub-wavelength displacements
US7283677B2 · kind B2 · utility
3Cited by
3References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 31, 2004 |
| Grant date | Oct 16, 2007 |
| Priority date | — |
| Expiry date | Jun 16, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/256
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Measurement systems and methods extend the use of optical navigation to measure displacements smaller than a wavelength of the light used to capture images of an object measured. Nanometer-scale movements can thus be measured, for example, in equipment used for manufacture of integrated circuits or nanometer scale devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.