Probe head for a coordinate measuring machine

US7284337B2 · kind B2 · utility

Assignee

• Carl Zeiss Industrielle Messtechnik GmbH · DE

Inventors

• Kurt Brenner · Satteldorf, DE
• Walter Jenisch · Heidenheim, DE
• Horst Stacklies · Greding, DE
• Roland Roth · Schwäbisch Gmünd, DE

Key dates

• Filing date: Apr 14, 2005
• Grant date: Oct 23, 2007
• Expiry date: Apr 14, 2025

Classification

• Technology area (CPC G): Physics
• CPC primary: G01B7/012
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A probe head for a coordinate measuring machine has a stylus resiliently suspended in a housing. A sensor arrangement serves for detecting deflections of the stylus relative to the housing. The sensor arrangement comprises at least one Hall sensor having a magnet and a Hall element arranged in a vicinity to each other. When the stylus is deflected, the magnet is laterally passed by the Hall element in a direction defined from the North Pole to the South Pole of the magnet or vice versa. A Hall voltage of changing polarity can be tapped at the Hall element then. A preferably linear range around the polarity change is processed in order to determine the deflection of the stylus.