Method and apparatus for measuring viscosity
US7284413B2 · kind B2 · utility
Inventors
Key dates
| Filing date | May 28, 2001 |
| Grant date | Oct 23, 2007 |
| Priority date | — |
| Expiry date | May 28, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2203/0094
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for measuring the viscosity of a fluid having a first rigid member extending from a body of semiconductor material and provided with a first conductive path and a second resiliently flexible member provided with a second conductive path and arranged in cantilever fashion over the rigid member. At least one of the conductive paths may be selectively energized to brig about relative movement between the rigid and flexible member. Subsequent deenergization of the path causes the resiliently flexible member to return to its initial position, the rate of return being measured to derive a signal representative of the viscosity. Also described are methods of carrying out the measurement and of fabricating the apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.