Holding device for disk-shaped objects

US7284760B2 · kind B2 · utility

Assignee

• Nanophotonics Co., Ltd. · DE

Inventors

• Sönke Siebert · Mainz, DE
• Michael Schweiger · Orlamünde, DE
• Andreas Lang · Ettringen, DE

Key dates

• Filing date: Aug 6, 2004
• Grant date: Oct 23, 2007
• Expiry date: Mar 12, 2025

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T279/33
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

Semiconductor technology requires the use of object holders, which are capable of holding wafers securely, also during rotation. In order to save time and expense, such holders should be suitable for integration directly into a processing facility, wherever possible. According to the invention it is proposed to provide centrally mounted holders which comprise support surfaces for the wafer and pivotable gripper fingers, in which the gripper fingers are pretensioned by means of at least one pretension element in the holding position and are actuated through one opening mechanism, in which at least one opening mechanism and at least one pretension element are integrated in the central clamping arm fixture and/or in the clamping arms.