Apparatus for treating perfluorocompound gas
US7285250B2 · kind B2 · utility
4Cited by
3References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 3, 2002 |
| Grant date | Oct 23, 2007 |
| Priority date | — |
| Expiry date | Jun 1, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02C20/30
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
In order to prevent exhaust pipe for exhausting perfluorocompound (PFC) decomposition gas after washing from corrosion, a mist separating apparatus is provided at a rear stage of the washing tower for washing the PFC decomposition gas. The corrosion of the exhaust pipe can be prevented by removing the mist from the washed gas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.