Method of removing tar-forming gases from CVD/CVI furnace effluent
US7285257B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 27, 2004 |
| Grant date | Oct 23, 2007 |
| Priority date | — |
| Expiry date | Jan 21, 2026 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D2258/0216
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Method for removing tar-forming hydrocarbons from an effluent gas mixtures from Chemical Vapor Deposition or Chemical Vapor Infiltration processes. Method includes passing at elevated temperature effluent gas mixture containing hydrogen, methane, and high molecular weight hydrocarbons through a bed that contains iron pellets, thereby decomposing tar-forming high molecular weight hydrocarbons in the effluent gas mixture. Apparatus including a de-tarring vessel (5) having a packed bed (7, 8, 9) of iron or iron oxide pellets (1) resting over a perforated distributor plate (2) and having an exhaust port (12), said de-tarring vessel being operatively linked via an exhaust port (6) to a CVI or CVD reactor vessel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.