Post-cleaning chamber seasoning method
US7288284B2 · kind B2 · utility
22Cited by
17References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 26, 2004 |
| Grant date | Oct 30, 2007 |
| Priority date | — |
| Expiry date | Mar 26, 2024 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/4405
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for seasoning a process chamber is disclosed. The seasoning method includes providing a seasoning film on the interior surfaces of a process chamber, typically after cleaning of the chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.