Fullerenes to increase radiation resistance in polymer-based pellicles
US7288299B2 · kind B2 · utility
2Cited by
4References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 31, 2003 |
| Grant date | Oct 30, 2007 |
| Priority date | — |
| Expiry date | May 5, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/3154
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A pellicle made of a polymer material contains fullerenes within the polymer material to reduce the damaging effects of radiation that is transmitted through the pellicle during an exposure operation. The fullerenes may comprise nanotubes and/or buckyballs. The buckyballs may also enclose molecules of a gas that further reduce the damaging effects of the radiation on the polymer material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.