Microcantilevers for biological and chemical assays and methods of making and using thereof

US7288404B2 · kind B2 · utility

Assignee

• The Regents of the University of California · US

Inventors

• Kambiz Vafai · Mission Viejo, US
• Cengiz S. Ozkan · San Diego, US
• Robert C. Haddon · Riverside, US
• Abdul Rahim A. Khaled · Riverside, US
• Mo Yang · Hengshan, TW

Key dates

• Filing date: Apr 25, 2003
• Grant date: Oct 30, 2007
• Expiry date: Jan 25, 2025

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B82Y30/00
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Disclosed herein are microcantilevers having structural shapes that are less sensitive to turbulence and drift effects yet provide greater deflections due to analyte concentration. The structural shapes include a C-shaped microcantilever, an E-shaped microcantilever, an L-shaped microcantilever, a double microcantilever, a slit microcantilever, a tapered microcantilever, and a triangular microcantilever. The microcantilevers may be piezoresistive microcantilevers. Also disclosed are microsensors, microfludic devices, and biochips that comprise the microcantilevers as well as methods of using the microcantilevers to detect analytes in a fluid sample.