Integrated driver process flow
US7288424B2 · kind B2 · utility
9Cited by
6References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 24, 2003 |
| Grant date | Oct 30, 2007 |
| Priority date | — |
| Expiry date | Jun 13, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D84/00
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
An integrated device includes one or more device drivers and a micro-electro-mechanical system (MEMS) structure monolithically coupled to the one or more device drivers. The one or more device drivers are configured to process received control signals and to transmit the processed control signals to the MEMS structure. Methods of fabricating integrated devices are also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.