Piezoelectric film device, and driving method of the same
US7288877B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 16, 2004 |
| Grant date | Oct 30, 2007 |
| Priority date | — |
| Expiry date | Aug 13, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/359
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A piezoelectric film device has a piezoelectric film element and a power supply circuit. The piezoelectric film element is formed of a first electrode, a second electrode, and a piezoelectric film that is sandwiched between the first electrode and second electrode and has a polarization vector in the film thickness direction. The polarization vector is inverted by application of a predetermined voltage or higher through the first electrode and second electrode. The power supply circuit supplies voltage for inverting the polarization vector. The piezoelectric film has each different lattice constant depending on the direction of the polarization vector. The piezoelectric film device keeps a different displacement position corresponding to the direction of the polarization vector even when the voltage application is stopped.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.