Confocal reflectommeter/ellipsometer to inspect low-temperature fusion seals
US7289200B1 · kind B1 · utility
2Cited by
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20Claims
0Family size
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Key dates
| Filing date | Oct 4, 2005 |
| Grant date | Oct 30, 2007 |
| Priority date | — |
| Expiry date | Feb 2, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/55
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device and method for measuring a fusion seal quality within a structure comprising a source for providing a focused optical beam of a known intensity to a fusion seal within a structure, the fusion seal reflecting the optical beam according to the fusion seal quality, a receiver for receiving the reflected optical beam and a processor are presented for measuring a intensity ratio between the reflected optical beam and the focused optical beam relating to fusion seal quality. The device may scan the structure and provide an intensity ratio image map for a region within the structure related to fusion seal quality.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.