Triangle-shaped planar optical waveguide having reduced scattering loss
US7290407B1 · kind B1 · utility
1Cited by
25References
4Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 19, 2001 |
| Grant date | Nov 6, 2007 |
| Priority date | — |
| Expiry date | Feb 17, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/136
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for forming an optical waveguide is disclosed. The method comprises first forming a lower cladding layer having at least one waveguide support. Next, a core material is formed onto the waveguide support using a high density plasma chemical vapor deposition (HDPCVD) process. Finally, an upper cladding layer is formed over the core material, such that the upper cladding layer and the lower cladding layer surround the core material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.