Photomask flipper and single direction inspection device for dual side photomask inspection
US7290978B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 9, 2004 |
| Grant date | Nov 6, 2007 |
| Priority date | — |
| Expiry date | Jun 9, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/9501
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A flipper for rotating and positioning a photomask in two flip orientations includes a flip unit rotatably held in a base. The flip unit includes a flip frame in which clamps are preferably spring loaded guided such that the clamps are oppositely and laterally displaceable between engaged positions and parking positions. A stepper motor rotates the flip unit between two flip orientations and positions the flip unit such that opposite inspection sides of the work piece are alternately oriented with respect to a single inspection direction. The flipper may be placed on or adjacent to a stage system of an inspection device. A robotically actuated effector may access the flipper for loading and unloading the work piece. In combination with an effector operating without lift motion, the clamps may feature wedge lift faces to lift the work piece off the effector during their actuation into engaged position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.