Patent · US Expired

Scanning electron microscope

US7294834B2 · kind B2 · utility

7Cited by
3References
34Claims
0Family size

Assignee

Inventor

Key dates

Filing dateJun 16, 2005
Grant dateNov 13, 2007
Priority date—
Expiry dateDec 30, 2025

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J2237/24485
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

In a scanning electron microscope, an emitted primary electron beam is diverted by an angle of at least about 45 degrees prior to incidence with a specimen. The beam may be bent by a magnetic separator. The separator may also serve to deflect secondary electron and back scattered electrons. As the angle of emissions and reflections from the specimen is close to the angle of incidence, bending the primary electron beam prior to incidence, allows the electron source to be located so as not to obstruct the travel of emissions and reflections to suitable detectors.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.