Thermal electromagnetic radiation detector comprising an absorbent membrane fixed in suspension
US7294836B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Aug 19, 2005 |
| Grant date | Nov 13, 2007 |
| Priority date | — |
| Expiry date | Jan 8, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/20
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The absorbent membrane of the detector is fixed in suspension by at least one thermally insulating support part onto a front face of a substrate comprising at least two electric connection terminals electrically connected to the membrane, for example by means of conducting layers. The support part has at least one base end and a raised zone. The base end is fixed to a top part of a conducting pillar having a base fixedly secured to one of the electric connection terminals. A substantially flat zone of a bottom face of the membrane is directly in contact with the raised zone of the support part. The support part is preferably formed by a bridge having a second base end fixed to a top part of a second pillar, the raised zone being formed by a flat middle part of the bridge.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.