Micro-lens built-in vertical cavity surface emitting laser
US7294863B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 19, 2001 |
| Grant date | Nov 13, 2007 |
| Priority date | — |
| Expiry date | Feb 23, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S5/18394
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micro-lens built-in vertical cavity surface emitting laser (VCSEL) includes a substrate and a lower reflector formed on the substrate. An active layer is formed on the lower reflector, generating light by a recombination of electrons and holes. An upper reflector is formed on the active layer including a lower reflectivity than that of the lower reflector. A micro-lens is disposed in a window region through which the laser beam is emitted. A lens layer is formed on the upper reflector with a transparent material transmitting a laser beam; the lens layer includes the micro-lens. An upper electrode is formed above the upper reflector excluding the window region a lower electrode formed underneath the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.