Piezoelectric vibrator, manufacturing method thereof, oscillator, electronic equipment, radio clock
US7294951B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 26, 2005 |
| Grant date | Nov 13, 2007 |
| Priority date | — |
| Expiry date | Oct 26, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A piezoelectric vibrator has a vibrator piece and a frame integral with the vibrator piece. The frame is connected to one end of and surrounds the vibrator piece. A lid has a surface anodically bonded to a first surface of the frame. The lid has a recessed portion at a position disposed opposite to and confronting the vibrator piece. A base has a surface anodically bonded to a second surface of the frame opposite the first surface thereof. The base has a recessed portion at a position disposed opposite to and confronting the vibrator piece. A beveled portion is formed around a surface of one of the lid and the base which does not correspond to the anodically bonded surface thereof.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.