Micro-engineered electron multipliers
US7294954B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 10, 2005 |
| Grant date | Nov 13, 2007 |
| Priority date | — |
| Expiry date | Jan 6, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J43/22
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
This invention provides for a simple method of fabricating miniature electron multipliers, in an in-plane configuration suitable for use with miniature analytic instruments such as mass filters. The materials involved are predominantly silicon and compatible oxides, allowing the possibility of integration with a mass filter formed in a similar materials system. The materials are selected simultaneously to withstand high voltages and to enhance secondary electron emission. Fabrication is based on standard planar processing methods. These methods also allow the construction of an integrated set of bias resistors in a multi-electrode device, so that the device may be operated from a single high-voltage source.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.