Single- and multi-photon polymerizable pre-ceramic polymeric compositions
US7297374B1 · kind B1 · utility
28Cited by
21References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 29, 2004 |
| Grant date | Nov 20, 2007 |
| Priority date | — |
| Expiry date | Nov 7, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/2053
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
A single- or multi-photon reactive composition comprises a liquid polysilazane precursor, a multifunctional acrylate additive, and a single- or multi-photon photocuring composition. The invention can be used to provide ceramic-based microstructures as, for example, high temperature resistant materials, including devices such as microcombustors, micro-heat-exchangers, sensor and actuator systems, microfluidic devices, and micro-optics systems that can be used independently or integrated into other systems.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.