Microelectromechanical device with reset electrode
US7298542B2 · kind B2 · utility
1Cited by
10References
8Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 7, 2006 |
| Grant date | Nov 20, 2007 |
| Priority date | — |
| Expiry date | Jun 7, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0833
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A microelectromechanical device having a reset electrode for use in various devices including display devices such as those employing spatial light modulators. The device includes an optically transmissive substrate, a semiconductor substrate, and a member deflectable between a rest position and an operative position supported by one of the substrates. The deflectable member returns to an undeflected position by operation of the reset electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.