Radiographic inspection apparatus and radiographic inspection method
US7298815B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 7, 2006 |
| Grant date | Nov 20, 2007 |
| Priority date | — |
| Expiry date | Jul 7, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2223/419
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A radiographic inspection method of irradiating a circuit forming device with X-rays to inspect the inside of the device. The method includes an X-ray irradiation step of irradiating the circuit forming device with X-rays, an X-ray detection step of detecting X-rays having penetrated the circuit forming device which is rotated every predetermined degrees of angle about an axis intersecting the irradiation direction of X-rays at right angles, a tomogram creating step of creating a plurality of tomograms based on data on penetrated X-rays detected in the X-ray detection step, a projected image creating step of creating projected images in three axial directions intersecting at right angles based on the plurality of tomograms created in the tomogram creating step, and a defect detecting step of detecting a defect such as a crack of the circuit forming device based on the projected images created in the projected image creating step.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.