Method for fabricating micro-electro-mechanical systems
US7299538B2 · kind B2 · utility
69Cited by
8References
2Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 14, 2004 |
| Grant date | Nov 27, 2007 |
| Priority date | — |
| Expiry date | Nov 22, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49155
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present invention relates to micro-electro-mechanical systems (MEMS). The present invention relates to a design feature that allows lower actuation voltage for electrostatically actuated structures (i.e., switches or mirrors). The present invention further relates to a method for fabricating such a design that allows lower actuation voltage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.