Integrated microvalve and method for manufacturing a microvalve

US7299818B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Stefan Pinter · Reutlingen, DE
• Tjalf Pirk · Stuttgart, DE

Key dates

• Filing date: Dec 23, 2004
• Grant date: Nov 27, 2007
• Expiry date: Jun 5, 2025

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T137/7761
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An integrated microvalve has a substrate, a first function layer applied to the substrate, and a second function layer applied to the first function layer, the first function layer being designed as a diaphragm in at least one valve area, the second function layer being removed in the valve area and in a fluid discharge area, and an anvil connected essentially only to the diaphragm being exposed from the substrate in the valve area, a plate being applied to the second function area to form a valve space.