MEMS microphone
US7301212B1 · kind B1 · utility
42Cited by
0References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 30, 2004 |
| Grant date | Nov 27, 2007 |
| Priority date | — |
| Expiry date | Nov 4, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R19/016
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
The sensitivity of a MEMS microphone is substantially increased by using a portion of the package that holds the MEMS microphone as the diaphragm or a part of the diaphragm. As a result, the diaphragm of the present invention is substantially larger, and thus more sensitive, than the diaphragm in a comparably-sized MEMS microphone die.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.