MEMS mirror with parallel springs and arched support for beams
US7301689B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 31, 2005 |
| Grant date | Nov 27, 2007 |
| Priority date | — |
| Expiry date | Nov 4, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micro-electro-mechanical system (MEMS) mirror device includes (1) a mirror, (2) a first group of spring elements coupled to one half of the mirror, (3) a first beam coupled to the first group of spring elements, (4) a first spring coupled to the first beam, and (5) a first stationary pad coupled to the first spring. The device further includes (6) a second group of spring elements coupled in parallel to another half of the mirror, (7) a second beam coupled to the second group of spring elements, (8) a second spring coupled to the second beam, (9) and a second stationary pad coupled to the second spring. The device further includes a third beam that rigidly interconnects the first and the second beams so they rotate the mirror in unison.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.