Tunable filter and method of manufacturing the same, and sensing device
US7301703B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 2, 2005 |
| Grant date | Nov 27, 2007 |
| Priority date | — |
| Expiry date | Jun 2, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/001
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A tunable filter including; a fixed substrate provided with a fixed reflecting film and capable of transmitting light having a shorter wavelength than infrared light; a movable substrate provided with a movable section equipped with a movable reflecting film and disposed to the fixed substrate so that the movable reflecting film and the fixed reflecting film faces each other with a predetermined length of gap; and a drive section for varying the length of the gap by displacing the movable section with respect to the fixed substrate, wherein light entering the gap from the outside is repeatedly reflected by the movable reflecting film and the fixed reflecting film for outputting light having a wavelength corresponding to the length of the gap, and the movable section is provided, at an area to which the movable reflecting film is disposed, with a light transmitting section capable of transmitting light having a shorter wavelength than infrared light and for inputting/outputting light from/to the outside.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.