Test head for optically inspecting workpieces
US7302148B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 22, 2005 |
| Grant date | Nov 27, 2007 |
| Priority date | — |
| Expiry date | May 12, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B5/8404
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical test head comprises a block of material with a plurality of optical paths extending therethrough. At least one of the optical paths is an input optical path for receiving laser light and holding a lens for focusing the laser light on a workpiece that is proximate the head. At least another of the optical paths is an output path for receiving light that is reflected off of the workpiece and providing that light to a detector. (In one embodiment, several detectors are provided to direct specularly reflected light, narrow angle scattered light, wide angle scattered light and back scattered light to associated detectors.) Other optical elements can be affixed within or to the block of material. The test head can be used without requiring the individual optical elements to be aligned or adjusted.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.