MEMS capacitive cantilever strain sensor, devices, and formation methods
US7302858B2 · kind B2 · utility
Inventors
Key dates
| Filing date | Sep 24, 2004 |
| Grant date | Dec 4, 2007 |
| Priority date | — |
| Expiry date | Sep 24, 2024 |
Classification
- Technology area (CPC A)Human Necessities
- CPC primaryA61B2562/028
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
An embodiment of the invention provides a MEMS cantilever strain sensor. Capacitor plates in a MEMS device of the invention are carried on cantilevered opposing micro-scale plates separated by a micro-scale gap under an unstrained condition. At least one of the micro-scale plates may be attached to a substrate or forms a substrate, which may be part of a monitored system. When a load is applied to the substrate, distal ends of the opposing cantilevered micro-scale plates become further separated, resulting in a change of capacitance. The change of capacitance is proportional to a load and therefore is an indication of the strain. Electrodes may be integrated into the strain sensor to provide a connection to measurement circuitry, for example. Sensors of the invention also provide for telemetric communication using radio frequency (RF) energy and can be interrogated without a power supply to the sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.