Torque sensor
US7302864B2 · kind B2 · utility
7Cited by
17References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 23, 2005 |
| Grant date | Dec 4, 2007 |
| Priority date | — |
| Expiry date | Mar 20, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L3/10
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A plurality of acoustic wave sensing devices can be provided, which are mechanically simulated for implementation upon a quartz wafer substrate. The quartz wafer substrate is appropriately etched to produce a quartz diaphragm from the quartz wafer substrate. A plurality of torque SAW sensing resonators can then be located upon the quartz wafer substrate, which is based upon previously mechanically simulated devices for implementation upon the substrate, together with a quartz cover to thereby produce a quartz torque sensor package from the quartz wafer substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.