Liquid media containing Lewis acidic reactive compounds for storage and delivery of Lewis basic gases
US7303607B2 · kind B2 · utility
3Cited by
14References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 14, 2004 |
| Grant date | Dec 4, 2007 |
| Priority date | — |
| Expiry date | Nov 5, 2025 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF17C2270/0518
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
This invention relates to an improvement in a low-pressure storage and delivery system for gases having Lewis basicity, particularly hazardous specialty gases such as phosphine and arsine, which are utilized in the electronics industry. The improvement resides in storing the gases in a liquid incorporating a reactive compound having Lewis acidity capable of effecting a reversible reaction between a gas having Lewis basicity. The reactive compound comprises a reactive species that is dissolved, suspended, dispersed, or otherwise mixed with a nonvolatile liquid.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.