Phase measuring method and apparatus for multi-frequency interferometry
US7304745B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 29, 2003 |
| Grant date | Dec 4, 2007 |
| Priority date | — |
| Expiry date | Apr 18, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/25
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention provides a novel method for absolute fringe order identification in multi-wavelength interferometry based on optimum selection of the wavelengths to be used. A theoretical model of the process is described which allows the process reliability to be quantified. The methodology produces a wavelength selection which is optimum with respect to the minimum number of wavelengths required to achieve a target dynamic measurement range. Conversely, the maximum dynamic range is produced from a given number of optimally selected wavelengths utilized in a sensor. The new concept introduced for optimum wavelength selection is scalable, i.e. from a three wavelength system to a four wavelength system, from four wavelengths to five, etc.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.