Optical tunable filter and method of manufacturing the same
US7304800B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 2, 2004 |
| Grant date | Dec 4, 2007 |
| Priority date | — |
| Expiry date | Sep 4, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J3/26
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical tunable filter is provided including a first substrate having light transmission properties and having a movable part and a supporting member that movably supports the movable part and having a smaller thickness than the movable part, a second substrate having light transmission properties and opposed to the first substrate, a first gap and a second gap provided between the movable part and the second substrate, an interference part causing interference between the movable part and the second substrate through the second gap and a drive member changing an interval of the second gap by moving the movable part to the second substrate by making use of the first gap.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.